JPH033574Y2 - - Google Patents
Info
- Publication number
- JPH033574Y2 JPH033574Y2 JP16786286U JP16786286U JPH033574Y2 JP H033574 Y2 JPH033574 Y2 JP H033574Y2 JP 16786286 U JP16786286 U JP 16786286U JP 16786286 U JP16786286 U JP 16786286U JP H033574 Y2 JPH033574 Y2 JP H033574Y2
- Authority
- JP
- Japan
- Prior art keywords
- target
- substrate
- substrate holder
- holder
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 36
- 238000004544 sputter deposition Methods 0.000 claims description 18
- 230000002159 abnormal effect Effects 0.000 description 5
- 239000012212 insulator Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052681 coesite Inorganic materials 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16786286U JPH033574Y2 (en]) | 1986-10-31 | 1986-10-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16786286U JPH033574Y2 (en]) | 1986-10-31 | 1986-10-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6373356U JPS6373356U (en]) | 1988-05-16 |
| JPH033574Y2 true JPH033574Y2 (en]) | 1991-01-30 |
Family
ID=31100195
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16786286U Expired JPH033574Y2 (en]) | 1986-10-31 | 1986-10-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH033574Y2 (en]) |
-
1986
- 1986-10-31 JP JP16786286U patent/JPH033574Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6373356U (en]) | 1988-05-16 |
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